Entegris Inc., a supplier of semiconductor materials, said on Wednesday it would buy smaller rival CMC Materials in a deal valued at $6.5 billion, as it looks to build scale amid an unprecedented global chip shortage. Semiconductor-related businesses have been consolidating, with companies looking to scale up to invest in R&D and manufacturing to meet burgeoning demand. CMC shareholders will receive $133.00 in cash and 0.4506 shares of Entegris common stock for each share they own. Based on Reuters’ calculations, the cash-and-stock portion of the offer is valued at $197.36 per share, or $5.61 billion, a premium of about 35 percent to CMC’s Tuesday close. Shares of CMC surged 33 percent on Wednesday. Entegris shares initially tumbled about 6 percent but pared most losses by the close of trading. “This deal will add to Entegris’s portfolio, making them more of a one-stop-shop in the semiconductor materials space,” analysts at Citigroup …